Hierarchical Transport Modeling for Path-Finding DTCO

L.-C. Hung, G. Rzepa, M. Kampl, C.-M. Tsai, F. Schanovsky, O. Baumgartner, Z. Stanojevic, M. Karner
We present a hierarchical flow for predictive TCAD device simulation in DCTO applications. Using a thoroughly calibrated sub-band Boltzmann transport equation (SBTE) solver, TCAD device simulation parameters or the technology under investigation are generated automatically. This flow enables predictive accuracy of the SBTE solver at turn-around-times of SPICE simulations. It is demonstrated here for an A14 nanosheet technology, i) showing all intermediate calibration details and ii) highlighting a considerable improvement in the accuracy of ringoscillator performance.
Publication date: 25 September 2024
Download document (PDF)
Document, read in your PDF viewer; 2 MB
Download PDF

{“@id”:”/api/v1/downloads/2456″,”@type”:”Download”,”id”:2456,”title”:”Hierarchical Transport Modeling for Path-Finding DTCO”,”filename”:”SISPAD-2024_Hierarchical-Transport-Modeling-for-Path-Finding-DTCO”,”abstract”:”We present a hierarchical flow for predictive TCAD device simulation in DCTO applications. Using a thoroughly calibrated sub-band Boltzmann transport equation (SBTE) solver, TCAD device simulation parameters or the technology under investigation are generated automatically. This flow enables predictive accuracy of the SBTE solver at turn-around-times of SPICE simulations. It is demonstrated here for an A14 nanosheet technology, i) showing all intermediate calibration details and ii) highlighting a considerable improvement in the accuracy of ringoscillator performance.”,”level”:null,”doi”:”10.1109/SISPAD62626.2024.10733086″,”status”:”published”,”remarks”:null,”files”:[{“@type”:”File”,”id”:20228,”name”:”SISPAD-2024_Hierarchical-Transport-Modeling-for-Path-Finding-DTCO.pdf”,”bytes”:1723783}],”tags”:[{“@id”:”/api/v1/download_tags/18″,”@type”:”DownloadTag”,”id”:18,”name”:”dtco”},{“@id”:”/api/v1/download_tags/20″,”@type”:”DownloadTag”,”id”:20,”name”:”publication”},{“@id”:”/api/v1/download_tags/59″,”@type”:”DownloadTag”,”id”:59,”name”:”pathfinding”},{“@id”:”/api/v1/download_tags/98″,”@type”:”DownloadTag”,”id”:98,”name”:”nanosheet”}],”date”:”2024-09-25T00:00:00+02:00″,”authors”:”L.-C. Hung, G. Rzepa, M. Kampl, C.-M. Tsai, F. Schanovsky, O. Baumgartner, Z. Stanojevic, M. Karner”}