Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology

G. Gaddemane, K. K. Bhuwalka, P. Matagne, G. Rzepa, M. V. d. Put, S. Santermans, O. Baumgartner, H. Wu, and G. Hellings
We benchmark possible device options for gate-all-around input/output devices which are process compatible with core logic gate-all-around (GAA) nanosheet devices. We consider a partial gate-all-around device (without metal filling between the sheets) as well as a device with a thin metal gate between the sheets, resulting in work-function mismatch between side- and inner-gates. The results are benchmarked against ideal GAA I/O devices to understand the performance impact for each case. The partial GAA device performs well under certain geometric conditions (WNS < 30 nm). However, the device with thin metal between the sheets shows excellent performance even for large WNS with large work-function deviation assumptions.
DOI: 10.1109/essderc55479.2022.9947139
Publication date: 19 September 2022
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