A Rich and Powerful Process Emulator
GTS ProEmu conveniently brings the process to DTCO – a perfect match with GTS CellDesigner: Understand how each process step affects subsequent steps as well as device performance. Combine process modules to quickly explore new process flow designs, assess variability and yield. Tune your technology, leap ahead.
Applications
- Process flow design
- Variability & yield
- DTCO
Explore Key Technology Parameters with Design and Process in Mind
- Variability in masks & processes
- Identify critical process steps
- Examine effects down the line
- Study the impact on reliability
Technologies differ increasingly. Optimize your process to get the most out of your FinFET, NSFET, NWFET, and CFET designs.
Emulation Models / Process Steps
Emulation
- Etching
- Deposition (CVD)
- Spin-On-Glass (SOG)
- Selective Epitaxial Growth (SEG)
- Wet Etching
Geometric Models
- Planarization (CMP)
- Fill
- Directional Etching
- Geometric Ion Etch
Material Operations
- Add Material from Shape
- Cut-out Material with Shape
- Subtract (present or inverted) Shape from Material
- Remove Material
- Move Material Vertically
Analytical Doping Operations
- Add Doping from Mask
- Add Doping from Equation
- Remove Doping
Process Modules and Output
- Process Group (Contains a number of processes)
- Output for visualization and device simulation
Simulation Models (as Part of ProSim)
- Ion Implantation
- Simple Implantation
- Dopant Diffusion
Integration with Process-Aware DTCO
Use your mask layouts and customize easy-to-use technology process flows to investigate single devices, cells, and circuits. Add process variation in your flow and understand critical process steps and their impact on power, performance, variability, and reliability. Use predictive device simulations (NDS), TCAD calculations, and spice in unison, to optimize your process, design, and technology.
Open to Integration with Other Tools
Besides being embedded in GTS Framework for easy setup of workflows (e.g. with GTS CellDesigner) including the DoE (splits) tool and integrated optimizer, ProEmu can easily be used in combination with other tools.
- Integration with process simulation
- Wide interoperability with 3rd-party tools
Environment
- Integration in GTS Framework (DoE, Optimizer, workflows, device and circuit simulators)
- Intuitive and versatile graphical user interface
- Comprehensive scripting interface
- Efficient multi-core simulation support
A Dependable Companion for Process Emulation in all Contexts
- Flexibly change and combine process modules
- Investigate the impact of each process step
- Full interoperability with process simulation
- Reliability & variability comprehensively covered
- Robust and computationally efficient
- Full integration with TCAD and DTCO