DTCO - Extraction of FEOL / MOL Gate C components – Application Example

{“@id”:”/api/v1/downloads/3015″,”@type”:”Download”,”id”:3015,”title”:”DTCO – Extraction of FEOL / MOL Gate C components \u2013 Application Example”,”filename”:”FEOL_GateCapacitanceExtraction_FinFET”,”abstract”:” In this example front- and mid-of-line (FEOL/MOL) gate capacitance components are extracted with an automated TCAD flow. There are two extraction methods presented, of which one will employ gate-length modulation to validate the accuracy of the more efficient approach. “,”level”:3,”doi”:null,”status”:”published”,”remarks”:null,”files”:[{“@type”:”File”,”id”:26093,”name”:”FEOL_GateCapacitanceExtraction_FinFET.png”,”bytes”:13042},{“@type”:”File”,”id”:26094,”name”:”FEOL_GateCapacitanceExtraction_FinFET.zip”,”bytes”:35650899},{“@type”:”File”,”id”:26095,”name”:”FEOL_GateCapacitanceExtraction_FinFET.pdf”,”bytes”:974967}],”tags”:[{“@id”:”/api/v1/download_tags/18″,”@type”:”DownloadTag”,”id”:18,”name”:”dtco”},{“@id”:”/api/v1/download_tags/23″,”@type”:”DownloadTag”,”id”:23,”name”:”example”},{“@id”:”/api/v1/download_tags/183″,”@type”:”DownloadTag”,”id”:183,”name”:”release-gts-2025-09″}],”date”:”2026-01-28T00:00:00+01:00″,”authors”:null}