DTCO - Extraction of FEOL / MOL resistance components – Application Example

{“@id”:”/api/v1/downloads/3293″,”@type”:”Download”,”id”:3293,”title”:”DTCO – Extraction of FEOL / MOL resistance components – Application Example”,”filename”:”FEOL_ResistanceExtraction_FinFET”,”abstract”:” In this example front- and mid-of-line (FEOL/MOL) resistance components are extracted with an automated TCAD flow. There are two extraction methods presented, of which one will concentrate on interface resistance and one on series resistance extraction over the channel. “,”level”:3,”doi”:null,”status”:”published”,”remarks”:null,”files”:[{“@type”:”File”,”id”:28113,”name”:”FEOL_ResistanceExtraction_FinFET.zip”,”bytes”:36909845},{“@type”:”File”,”id”:28114,”name”:”FEOL_ResistanceExtraction_FinFET.pdf”,”bytes”:663106},{“@type”:”File”,”id”:28115,”name”:”FEOL_ResistanceExtraction_FinFET.png”,”bytes”:16550}],”tags”:[{“@id”:”/api/v1/download_tags/18″,”@type”:”DownloadTag”,”id”:18,”name”:”dtco”},{“@id”:”/api/v1/download_tags/23″,”@type”:”DownloadTag”,”id”:23,”name”:”example”},{“@id”:”/api/v1/download_tags/187″,”@type”:”DownloadTag”,”id”:187,”name”:”release-gts-2026-03″}],”date”:”2026-06-02T00:00:00+02:00″,”authors”:null}