In this example, the compact-physics simulator Comphy is integrated in a TCAD flow to simulate the reliability of FETs under 10 years of AC operation. The full accuracy of 3D TCAD is maintained for the efficient calculations of the transient charging and discharging of the defects in the oxides and at the interfaces.
Project Name: DTCO_FinFET_N7_Reliability_Post_Minimos_BTI
PDF revision of 20 November 2023
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