Towards Physics-Based DTCO for Performance of Advanced Technology Nodes

Z. Stanojevic, O. Baumgartner, M. Karner, C. Kernstock, HW. Karner, H. Demel, G. Strof, F. Mitterbauer
We present a case study which shows the path towards design-technology co-optimization (DTCO) based on physical device modeling as opposed to simulation based on empirical mobility models. This allows for more accurate and robust predictions of device performance, and allows to assess novel process options found in 7 nm and 5 nm technology nodes. A more than ten-fold increase in computational efficiency brings turn-around times down sufficiently to make physical models suitable for the DTCO process.
Publication date: 09 September 2017
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