Exploring the Design Space of Non-Planar Channels: Shape, Orientation, and Strain

Zlatan Stanojevicc, Markus Karner, Hans Kosina
We conduct a comprehensive simulation study of non-planar n-type channels based on consistent, physical models containing measurable quantities rather than fit-parameters. This contrasts empirical thin-body models used in classical/quantum-corrected TCAD. The method involves the self-consistent solution of the two-dimensional Schrödinger-Poisson system,rncombined with linearized Boltzmann transport in the third dimension. We advance the art of simulation by (i) introducing quantum simulation on unstructured meshes for arbitraryrngeometries, (ii) providing an efficient framework for rapid evaluation of device designs, and (iii) contributing a surface roughness scattering model for arbitrarily shaped surfaces.rnConsistent modeling allows us to make reliable assertions with respect to device performance.
Publication date: 11 December 2013
Download document (PDF)
Document, read in your PDF viewer; 1 MB
Download PDF

{“@id”:”/api/v1/downloads/350″,”@type”:”Download”,”id”:350,”title”:”Exploring the Design Space of Non-Planar Channels: Shape, Orientation, and Strain”,”filename”:”IEDM-2013_Design-Space-Non-Planar-Channels-Shape-Orientation-Strain”,”abstract”:”We conduct a comprehensive simulation study of non-planar n-type channels based on consistent, physical models containing measurable quantities rather than fit-parameters. This contrasts empirical thin-body models used in classical/quantum-corrected TCAD. The method involves the self-consistent solution of the two-dimensional Schro\u0308dinger-Poisson system,rncombined with linearized Boltzmann transport in the third dimension. We advance the art of simulation by (i) introducing quantum simulation on unstructured meshes for arbitraryrngeometries, (ii) providing an efficient framework for rapid evaluation of device designs, and (iii) contributing a surface roughness scattering model for arbitrarily shaped surfaces.rnConsistent modeling allows us to make reliable assertions with respect to device performance.”,”level”:null,”doi”:”10.1109/IEDM.2013.6724618″,”status”:”published”,”remarks”:null,”files”:[{“@type”:”File”,”id”:1367,”name”:”IEDM-2013_Design-Space-Non-Planar-Channels-Shape-Orientation-Strain.pdf”,”bytes”:632187}],”tags”:[{“@id”:”/api/v1/download_tags/20″,”@type”:”DownloadTag”,”id”:20,”name”:”publication”},{“@id”:”/api/v1/download_tags/44″,”@type”:”DownloadTag”,”id”:44,”name”:”vsp”},{“@id”:”/api/v1/download_tags/59″,”@type”:”DownloadTag”,”id”:59,”name”:”pathfinding”},{“@id”:”/api/v1/download_tags/60″,”@type”:”DownloadTag”,”id”:60,”name”:”innovation”},{“@id”:”/api/v1/download_tags/70″,”@type”:”DownloadTag”,”id”:70,”name”:”si pathfinding”}],”date”:”2013-12-11T00:00:00+01:00″,”authors”:”Zlatan Stanojevicc, Markus Karner, Hans Kosina”}