Surface-Roughness-Scattering in Non-Planar Channels – the Role of Band Anisotropy

Z. Stanojević, H. Kosina
We developed a new generic method for evaluating the surface-roughness-induced scattering rate in non-planar semiconductor structures. The method accurately captures band anisotropy and the roughness-induced momentum transfer between the confined states. Strong dependence of SRS-limited electron mobility on crystal orientation was observed with and [110]/(11̄0) being the optimal orientations.
Publication date: 05 September 2013
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