Scaling FDSOI Technology down to 7 nm – a Physical Modeling Study Based on 3D Phase-Space Subband Boltzmann Transport

Z. Stanojevic, O. Baumgartner, F. Schanovsky, G. Strof, C. Kernstock, M. Karner, J.M. González Medina, F.G. Ruiz, A. Godoy, F. Gámiz
We present the first truly full-band approach to solving the subband Boltzmann transport (SBTE) equation in three-dimensional phase space. The solution is applied to investigate the evolution of the FDSOI MOSFET towards the 7nm node. Our findings show that single-gate FDSOI technology can be effectively scaled down to the 14 nm node, because the on-current gains are large enough to offset the SS-degradation. Beyond 14 nm a double-gate thin-body geometry is required to maintain electrostatic control.
Publication date: 21 March 2018
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{“@id”:”/api/v1/downloads/301″,”@type”:”Download”,”id”:301,”title”:”Scaling FDSOI Technology down to 7 nm \u2013 a Physical Modeling Study Based on 3D Phase-Space Subband Boltzmann Transport”,”filename”:”EUROSOI-ULIS-2018_Scaling-FDSOI-Technology-down-to-7nm-IEEE”,”abstract”:”We present the first truly full-band approach to solving the subband Boltzmann transport (SBTE) equation in three-dimensional phase space. The solution is applied to investigate the evolution of the FDSOI MOSFET towards the 7nm node. Our findings show that single-gate FDSOI technology can be effectively scaled down to the 14 nm node, because the on-current gains are large enough to offset the SS-degradation. Beyond 14 nm a double-gate thin-body geometry is required to maintain electrostatic control.”,”level”:null,”doi”:”10.1109/ULIS.2018.8354741″,”status”:”published”,”remarks”:null,”files”:[{“@type”:”File”,”id”:1685,”name”:”EUROSOI-ULIS-2018_Scaling-FDSOI-Technology-down-to-7nm-IEEE.pdf”,”bytes”:1050660}],”tags”:[{“@id”:”/api/v1/download_tags/20″,”@type”:”DownloadTag”,”id”:20,”name”:”publication”},{“@id”:”/api/v1/download_tags/58″,”@type”:”DownloadTag”,”id”:58,”name”:”nds”},{“@id”:”/api/v1/download_tags/59″,”@type”:”DownloadTag”,”id”:59,”name”:”pathfinding”},{“@id”:”/api/v1/download_tags/60″,”@type”:”DownloadTag”,”id”:60,”name”:”innovation”},{“@id”:”/api/v1/download_tags/70″,”@type”:”DownloadTag”,”id”:70,”name”:”si pathfinding”},{“@id”:”/api/v1/download_tags/94″,”@type”:”DownloadTag”,”id”:94,”name”:”soi”}],”date”:”2018-03-21T00:00:00+01:00″,”authors”:”Z. Stanojevic, O. Baumgartner, F. Schanovsky, G. Strof, C. Kernstock, M. Karner, J.M. Gonza\u0301lez Medina, F.G. Ruiz, A. Godoy, F. Ga\u0301miz”}