Full-Band Modeling of Mobility in p-type FinFETs

Z. Stanojevic, O. Baumgartner, M. Karner, La. Filipovic, C. Kernstock, H. Kosina
We present a framework for modeling the low-field mobility of ultra-narrow Si channels such as FinFETs based on a full-band description of the electronic structure. Hole mobility is of particular interest since its calculation necessitates a full-band approach. Our approach is entirely based on physical modeling and thus naturally includes effects of gate field, crystal orientation, or strain.
Publication date: 09 June 2014
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